Diamond Powder For Semiconductor Chamber Cleaning Tools
What This Process Needs To Solve
A CMP chamber accumulates slurry residue, pad debris and reaction by-products on the chamber wall, the wafer carrier and the electrodes. If it is not removed, particles detach and land on wafers. The tools used — diamond cleaning pads, scrub pads and tips — have to abrade that residue inside a high-vacuum, contamination-sensitive environment, which puts a different set of constraints on the diamond than grinding or polishing does.
What changes inside a vacuum chamber
Three things matter. Outgassing: any volatile residue on the powder will evaporate under vacuum and redeposit on optics and wafers. Metallic contamination: a chamber cleaned with an iron-contaminated abrasive is a chamber that will fail a metals test. Wear debris: the pad must cut without shedding its own particles. In practice this means high-purity, demagnetised, tightly graded powder — and it is why the same grit that is fine for a saw segment is not suitable here.
How the pads are built
Most cleaning pads and scrub pads are electroplated, so coating adhesion is part of the specification: the diamond has to stay in the nickel layer while it is being dragged across a ceramic or metal surface. Chemical inertness matters too, because chamber cleaning often sits alongside plasma exposure, and a diamond that degrades there becomes a contamination source itself.
Recommended Grades And Size Ranges
Cleaning pads and scrub pads are usually electroplated. Grade selection is driven by purity and demagnetisation first, then by the surface being cleaned.
| Tool | Recommended grade | Size range | Why this grade |
|---|---|---|---|
| Chamber cleaning toolsCleaning pads, scrub pads and tips | |||
| Scrub pad / cleaning pad | MBD-4 high-grade monocrystalline | 80# – 400# | High purity, demagnetised, low wear debris |
| Cleaning paste and compound | HDY monocrystalline micron | W0.25 – W40 | Fine residue removal without scratching |
| General chamber abrasive | HDYR and HDHR crushed grit | 80/100 – 325/400 | Yellow crushed grit for coarser deposits |
Total supply window is 1 to 600 µm. Purity and demagnetisation are handled as separate process steps — tell us the chamber material and whether the part sits in vacuum or plasma, and we will confirm the grade on a sample.
What has to hold
- High purity
- Demagnetised
- Strong coating adhesion
- No metallic contamination introduced
Where it ships
Diamond Grades For This Process
Factory Direct Since 1990
Zhecheng Hongxiang Superhard Material Co., Ltd. is an integrated manufacturer and exporter of synthetic diamond powders since 1990, located in the Diamond Capital of China.
- Own manufacturing base in Zhengzhou, Henan — powder, coating and grading on one site.
- In-house particle size and SEM inspection on every batch before packing.
- Export packing with neutral or custom label, plus sample quantities for process trials.
What To Include
Describe your workpiece, process and target result. We will match the diamond grade from the existing product range.